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Chip hardware maker has figured out how AI can speed up process debugging
06.04.2021 [14:38],
Gennady Detinich

The American company Applied Materials has created and is promoting the AIx platform to manufacturers, which promises a breakthrough in semiconductor technologies at all stages of their creation, from laboratory to factory. Powered by artificial intelligence and big data technologies, the AIx (Actionable Insight Accelerator) platform will help engineers track all stages of chip production in real time. Setting up and launching technical processes will go faster.

New tools will open up unprecedented opportunities for developers and practitioners. Previously, engineers relied on linear data flow and statistical sampling. The AIx platform operates with an incredible amount of data at each time interval, allowing you to evaluate the progress of the technological process by a variety of parameters, both in time and in space. Engineers will receive only the key ones that are important for the production of chips. This will allow you not to be distracted by the analysis of redundant information and speed up the implementation and debugging of technical processes.

AIx platform works with all Applied Materials manufacturing and metrology equipment. Ability to perform millions of measurements on wafers and individual chips, and optimize thousands of process variables to improve the overall performance of semiconductor solutions, can be transferred from laboratories to factories. This will simplify and speed up the debugging of the latest technological processes and will allow you to quickly get a commercial return on significant investments in new production.

AIx platform introduction. Image source: Applied Materials

Applied Materials estimates that the AIx platform can cut the time in the development phase of chips in half and by one third in the implementation phase.

“Engineers have thousands of process variables to choose from, and only a few subtle correlations hold the key to optimizing recipes for world-class results,” said Raman Achutharaman, Vice President, Applied Materials. AIx identifies and communicates this critical data, providing engineers with the practical insights they need to accelerate time to market. «.

An example of an Applied Materials production setup with six chambers. Image source: Applied Materials

Let’s add, in general terms, the AIx platform includes a set of sensors for production chambers (compartments where plates are processed) that provide engineers with real-time analytics of variables such as chemical composition, energy, pressure, temperature and process duration. Also available is a unique built-in vacuum metrology that allows new films to be measured during deposition with angstrom accuracy. Digital technologies are not far behind, from the creation of digital twins of processes to digital maps of processes. A very powerful tool for finding new solutions and identifying problem areas.

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